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标题:Surface defects and accompanying imperfections in 4H–SiC: Optical, structural and electrical characterization
时间:2020-10-29 16:59:30
DOI:10.1016/j.actamat.2011.09.010
大小:1391 kb
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目录:
  • Surface defects and accompanying imperfections in 4H–SiC: Optical, structural and electrical characterization
    • 1 Introduction
    • 2 Experimental
    • 3 Results
      • 3.1 Morphology and CL characterization
      • 3.2 Structural characterization
    • 4 Discussion
      • 4.1 Effects of the particles on epitaxial growth
      • 4.2 Differences between common and special particles
      • 4.3 Correlation with the electrical properties of the device
    • 5 Conclusions
    • Acknowledgement
    • References

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