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标题:Micro ultrasonic machining hemispherical mold for MEMS resonator gyroscope using a novel ultraprecise ceramic entire-ball tool
时间:2020-06-30 20:20:24
DOI:10.1088/1361-6439/ab8be2
大小:3239 kb
页数:14 PAGES
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目录:
  • Micro ultrasonic machining hemispherical mold for MEMS resonator gyroscope using a novel ultraprecise ceramic entire-ball tool
    • 1. Introduction
    • 2. Material removal and tool wear mechanism in micro-ultrasonic machining using UCET
      • 2.1. Material removal mechanism of micro-ultrasonic machining using UCET
      • 2.2. Analysis of the tool wear mechanism of a UCET and its influence on the form accuracy of the micromolds
    • 3. Experiment material and methods
      • 3.1. Experimental setup and material
      • 3.2. Experimental method and procedure
        • 3.2.1. Experimental design for the analysis of tool wear factors.
        • 3.2.2. Evaluation method for surface integrity and radius consistency of micromolds.
        • 3.2.3. Effect of the wear of entire-ball tools with different materials on the form accuracy of micromolds.
    • 4. Experimental results and discussion
      • 4.1. Experimental results and analysis of various factors that affect tool wear
      • 4.2. Edge chipping and radius change of micromolds machined by the UCET
      • 4.3. Morphological comparison of micromolds machined by entire-ball tools with different materials
    • 5. Conclusions
    • Acknowledgments
    • Appendix: Derivation of wear model
    • References

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