在线客服: 点击这里给我发消息  新用户使用步骤:会员注册→充值→重新登入→进入资源
标题:Design, fabrication and characterization of a piezoelectric MEMS diaphragm resonator mass sensor
时间:2020-01-15 12:22:07
DOI:10.1088/0960-1317/23/12/125019
关键词:Practical, Theoretical or Mathematical, Experimental/ crystal resonators; electroplating; gold; mass measurement; microfabrication; micromechanical resonators; microsensors/ mass sensitivity; sensor surface; electroplating; environmental stability; fabrication tolerances; Au; pressure 1 atm; piezoelectric MEMS diaphragm resonator mass sensor; degenerate resonant modes; environmental effects; average resonant frequency; quality factor; atmospheric pressure; electrically recovered signal-to-noise ratio; PZT performance; central displacement sensitivity/ A0710C Micromechanical and nanomechanical devices and systems A0630E Mass and density measurement A0670D Sensing and detecting devices B2575D Design and modelling of MEMS and NEMS devices B2575F Fabrication of MEMS and NEMS devices B2860A Piezoelectric devices B7230M Microsensors and nanosensors B7320M Mass and density measurement/ pressure 1.01325E+05 Pa/ Au/el
出版源: 《Journal of Micromechanics & Microengineering》 ,23 (12) :125019
摘要:This work reports on the design, fabrication and characterization of a piezoelectrically actuated mass sensor. The sensor utilizes degenerate resonant modes in which one mode is used as a reference to compensate for environmental effects. The project builds on a capacitively driven version of the sensor allowing improvements and challenges surrounding the new design to be assessed in relation to modeling and fabrication. The operational mode of interest showed an average resonant frequency of 7.8 MHz (quality factor of 490), at atmospheric pressure with an electrically recovered signal to noise ratio of 2400:1. The lead zirconate titanate performance yielded a central displacement sensitivity of 1.50 nm V-1, which is in good agreement with the levels predicted in modeling. A small initial split in the degenerate modes was recorded due to fabrication tolerances; however, the devices still exhibited good environmental stability, with a temperature sensitivity of only 11 Hz degrees C-1. Electroplating of gold onto the sensor surface demonstrated a device mass sensitivity of 12.0 Hz pg(-1).
大小:2106 kb
页数:16 PAGES
下载: 点击下载
预览:

浏览器不支持嵌入PDF阅读,打开新页面在线阅读

目录:
  • 1. Introduction
  • 2. Theory and modeling
    • 2.1. Basic model
    • 2.2. Placement of electrodes
    • 2.3. Modeling
  • 3. Design and fabrication
    • 3.1. Fabrication issues
    • 3.2. Design
    • 3.3. Fabrication
  • 4. Experimental details
    • 4.1. Device characterization
    • 4.2. Mass addition
  • 5. Results and discussion
    • 5.1. Determination of resonant frequencies
    • 5.2. PZT performance
    • 5.3. Environmental characterization
    • 5.4. Sensitivity
    • 5.5. Discussion
  • 6. Conclusions
  • Acknowledgment
  • References

本页内容由网络收集而来,版权归原创者所有,如有侵权请及时联系